JPH046007U - - Google Patents

Info

Publication number
JPH046007U
JPH046007U JP4452590U JP4452590U JPH046007U JP H046007 U JPH046007 U JP H046007U JP 4452590 U JP4452590 U JP 4452590U JP 4452590 U JP4452590 U JP 4452590U JP H046007 U JPH046007 U JP H046007U
Authority
JP
Japan
Prior art keywords
base
movable part
optical element
ball receiving
mounting device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4452590U
Other languages
English (en)
Japanese (ja)
Other versions
JP2540604Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990044525U priority Critical patent/JP2540604Y2/ja
Publication of JPH046007U publication Critical patent/JPH046007U/ja
Application granted granted Critical
Publication of JP2540604Y2 publication Critical patent/JP2540604Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Mounting And Adjusting Of Optical Elements (AREA)
JP1990044525U 1990-04-27 1990-04-27 光学素子取付装置 Expired - Fee Related JP2540604Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990044525U JP2540604Y2 (ja) 1990-04-27 1990-04-27 光学素子取付装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990044525U JP2540604Y2 (ja) 1990-04-27 1990-04-27 光学素子取付装置

Publications (2)

Publication Number Publication Date
JPH046007U true JPH046007U (en]) 1992-01-21
JP2540604Y2 JP2540604Y2 (ja) 1997-07-09

Family

ID=31557909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990044525U Expired - Fee Related JP2540604Y2 (ja) 1990-04-27 1990-04-27 光学素子取付装置

Country Status (1)

Country Link
JP (1) JP2540604Y2 (en])

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51105178A (ja) * 1975-03-12 1976-09-17 Takeo Akyama Keitaiyokyukyugu
JPH06167657A (ja) * 1992-12-01 1994-06-14 Sanyuu Denshi Kk マイクロマニピュレータ
US7119895B2 (en) 2000-11-28 2006-10-10 Honda Giken Kogyo Kabushiki Kaisha Method of and apparatus for adjusting optical component, and optical unit
JP2012175006A (ja) * 2011-02-23 2012-09-10 Komatsu Ltd 光学装置、レーザ装置および極端紫外光生成装置
JP2021530650A (ja) * 2018-07-13 2021-11-11 ノースロップ グラマン システムズ コーポレーション ボールベアリングによって駆動される角運動伝達

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62907A (ja) * 1985-06-27 1987-01-06 Ricoh Co Ltd 光学部品取り付けプレ−トの角度調整装置
JPH0171712U (en]) * 1987-10-29 1989-05-15

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62907A (ja) * 1985-06-27 1987-01-06 Ricoh Co Ltd 光学部品取り付けプレ−トの角度調整装置
JPH0171712U (en]) * 1987-10-29 1989-05-15

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51105178A (ja) * 1975-03-12 1976-09-17 Takeo Akyama Keitaiyokyukyugu
JPH06167657A (ja) * 1992-12-01 1994-06-14 Sanyuu Denshi Kk マイクロマニピュレータ
US7119895B2 (en) 2000-11-28 2006-10-10 Honda Giken Kogyo Kabushiki Kaisha Method of and apparatus for adjusting optical component, and optical unit
JP2012175006A (ja) * 2011-02-23 2012-09-10 Komatsu Ltd 光学装置、レーザ装置および極端紫外光生成装置
US9362703B2 (en) 2011-02-23 2016-06-07 Gigaphoton Inc. Optical device, laser apparatus, and extreme ultraviolet light generation system
JP2021530650A (ja) * 2018-07-13 2021-11-11 ノースロップ グラマン システムズ コーポレーション ボールベアリングによって駆動される角運動伝達

Also Published As

Publication number Publication date
JP2540604Y2 (ja) 1997-07-09

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Legal Events

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